| NEXX Systems was founded in August 2001 through the acquisition from MKS Instruments of the ASTeX systems group. The sale comprised the purchase of the Nimbus product line of sputter deposition systems and exclusive license to manufacture ECR microwave-driven plasma systems, originally sold as PlasmaQuest and now known as Cirrus. NEXX Systems' core technologies -- reactive gas/plasma processing, low temperature CVD, and PVD of thin films -- are well developed in the fabrication of integrated circuits. With the acquisition of All-Wet Technologies in April 2003, NEXX Systems has enhanced its product offering to include leading edge, low cost, high performance electro-deposition technology for metal and photoresist.
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